Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure

Research output: Contribution to journalArticleResearchpeer-review

External Organisational units

  • Infineon Technologies AG Austria
  • Erich Schmid Institute of Materials Science
  • Institute of Materials Science and Technology

Details

Original languageEnglish
Article number105179
JournalInternational Journal of Fatigue
Volume128
DOIs
Publication statusPublished - 1 Nov 2019