Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure
Research output: Contribution to journal › Article › Research › peer-review
Authors
External Organisational units
- Infineon Technologies AG Austria
- Erich Schmid Institute of Materials Science
- Institute of Materials Science and Technology
Details
Original language | English |
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Article number | 105179 |
Journal | International Journal of Fatigue |
Volume | 128 |
DOIs | |
Publication status | Published - 1 Nov 2019 |