Latest Research Output

• Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy

  Research output: Contribution to journal › Article › Research › peer-review

• Investigation of high cyclic fatigue behaviour of thin copper films using MEMS structure

  Research output: Contribution to journal › Article › Research › peer-review

• Design and fabrication of various MEMS-based structures for investigating thermo-mechanical and fatigue behavior of thin metal films and metal barriers

  Research output: Thesis › Doctoral Thesis