Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

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Standard

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. / Pachlhofer, Julia; Martin-Luengo, Aitana Tarazaga; Franz, Robert et al.
in: Journal of vacuum science & technology / A (JVST), Jahrgang 35, Nr. 2, 2017, S. 021504-1 - 021504-8.

Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

Harvard

Pachlhofer, J, Martin-Luengo, AT, Franz, R, Franzke, E, Köstenbauer, H, Winkler, J, Bonanni, A & Mitterer, C 2017, 'Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties', Journal of vacuum science & technology / A (JVST), Jg. 35, Nr. 2, S. 021504-1 - 021504-8. https://doi.org/10.1116/1.4973214

APA

Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A., & Mitterer, C. (2017). Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. Journal of vacuum science & technology / A (JVST), 35(2), 021504-1 - 021504-8. https://doi.org/10.1116/1.4973214

Vancouver

Pachlhofer J, Martin-Luengo AT, Franz R, Franzke E, Köstenbauer H, Winkler J et al. Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. Journal of vacuum science & technology / A (JVST). 2017;35(2):021504-1 - 021504-8. doi: http://dx.doi.org/10.1116/1.4973214

Author

Pachlhofer, Julia ; Martin-Luengo, Aitana Tarazaga ; Franz, Robert et al. / Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties. in: Journal of vacuum science & technology / A (JVST). 2017 ; Jahrgang 35, Nr. 2. S. 021504-1 - 021504-8.

Bibtex - Download

@article{a4282da8b07f4d798794e0fe39e6c366,
title = "Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties",
author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and H. K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Christian Mitterer",
year = "2017",
doi = "http://dx.doi.org/10.1116/1.4973214",
language = "English",
volume = "35",
pages = "021504--1 -- 021504--8",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

AU - Pachlhofer, Julia

AU - Martin-Luengo, Aitana Tarazaga

AU - Franz, Robert

AU - Franzke, Enrico

AU - Köstenbauer, H.

AU - Winkler, Jörg

AU - Bonanni, Alberta

AU - Mitterer, Christian

PY - 2017

Y1 - 2017

U2 - http://dx.doi.org/10.1116/1.4973214

DO - http://dx.doi.org/10.1116/1.4973214

M3 - Article

VL - 35

SP - 021504-1 - 021504-8

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

IS - 2

ER -

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