Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation
Research output: Contribution to journal › Article › Research › peer-review
Standard
Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation. / Bigl, Stephan; Wurster, Stefan; Cordill, Megan J. et al.
In: Materials, Vol. 10, No. 11, 1287, 09.11.2017.
In: Materials, Vol. 10, No. 11, 1287, 09.11.2017.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
APA
Vancouver
Bigl S, Wurster S, Cordill MJ, Kiener D. Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation. Materials. 2017 Nov 9;10(11):1287. doi: 10.3390/ma10111287
Author
Bibtex - Download
@article{38d26ddb0cd64b40a0d06db3916a3e88,
title = "Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation",
keywords = "Stress, Thermo-mechanical, Thin films",
author = "Stephan Bigl and Stefan Wurster and Cordill, {Megan J.} and Daniel Kiener",
year = "2017",
month = nov,
day = "9",
doi = "10.3390/ma10111287",
language = "English",
volume = "10",
journal = "Materials",
issn = "1996-1944",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "11",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Substrate-influenced thermo-mechanical fatigue of copper metallizations
T2 - Limits of Stoney's equation
AU - Bigl, Stephan
AU - Wurster, Stefan
AU - Cordill, Megan J.
AU - Kiener, Daniel
PY - 2017/11/9
Y1 - 2017/11/9
KW - Stress
KW - Thermo-mechanical
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85033723779&partnerID=8YFLogxK
U2 - 10.3390/ma10111287
DO - 10.3390/ma10111287
M3 - Article
AN - SCOPUS:85033723779
VL - 10
JO - Materials
JF - Materials
SN - 1996-1944
IS - 11
M1 - 1287
ER -
