Accelerated thermo-mechanical fatigue of copper metallizations studied by pulsed laser heating
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Pages (from-to) | 110-118 |
| Number of pages | 9 |
| Journal | Microelectronic engineering |
| Volume | 167 |
| DOIs | |
| Publication status | Published - 5 Jan 2017 |
