Substrate-influenced thermo-mechanical fatigue of copper metallizations: Limits of Stoney's equation
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Article number | 1287 |
| Journal | Materials |
| Volume | 10 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 9 Nov 2017 |
