Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
Research output: Contribution to journal › Article › Research › peer-review
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Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets. / Pachlhofer, Julia; Martin-Luengo, Aitana Tarazaga; Franz, Robert et al.
In: Surface & coatings technology, Vol. 332, 2017, p. 80-85.
In: Surface & coatings technology, Vol. 332, 2017, p. 80-85.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Pachlhofer, J, Martin-Luengo, AT, Franz, R, Franzke, E, Köstenbauer, H, Winkler, J, Bonanni, A, Mitterer, S & Mitterer, C 2017, 'Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets', Surface & coatings technology, vol. 332, pp. 80-85. https://doi.org/10.1016/j.surfcoat.2017.07.083
APA
Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A., Mitterer, S., & Mitterer, C. (2017). Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets. Surface & coatings technology, 332, 80-85. https://doi.org/10.1016/j.surfcoat.2017.07.083
Vancouver
Pachlhofer J, Martin-Luengo AT, Franz R, Franzke E, Köstenbauer H, Winkler J et al. Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets. Surface & coatings technology. 2017;332:80-85. doi: 10.1016/j.surfcoat.2017.07.083
Author
Bibtex - Download
@article{c2f6f608389843ccb6b9f6c34b0b9082,
title = "Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets",
author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Silvia Mitterer and Christian Mitterer",
year = "2017",
doi = "10.1016/j.surfcoat.2017.07.083",
language = "English",
volume = "332",
pages = "80--85",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
AU - Pachlhofer, Julia
AU - Martin-Luengo, Aitana Tarazaga
AU - Franz, Robert
AU - Franzke, Enrico
AU - Köstenbauer, Harald
AU - Winkler, Jörg
AU - Bonanni, Alberta
AU - Mitterer, Silvia
AU - Mitterer, Christian
PY - 2017
Y1 - 2017
U2 - 10.1016/j.surfcoat.2017.07.083
DO - 10.1016/j.surfcoat.2017.07.083
M3 - Article
VL - 332
SP - 80
EP - 85
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
