Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Applied Physics
- PLANSEE SE
Details
| Original language | English |
|---|---|
| Pages (from-to) | 80-85 |
| Journal | Surface & coatings technology |
| Volume | 332 |
| DOIs | |
| Publication status | Published - 2017 |
