Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Applied Physics
- PLANSEE SE
Details
| Original language | English |
|---|---|
| Pages (from-to) | 021504-1 - 021504-8 |
| Number of pages | 8 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 35 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2017 |
