Microstructural effects on the interfacial adhesion of nanometer- thick Cu films on glass substrates: Implications for microelectronic devices
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In: ACS Applied Nano Materials, Vol. 2021, No. 4, 2021, p. 61-70.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Microstructural effects on the interfacial adhesion of nanometer- thick Cu films on glass substrates: Implications for microelectronic devices
AU - Lassnig, A.
AU - Terziyska, Velislava
AU - Zalesak, Jakub
AU - Jörg, Tanja
AU - Többens, Daniel
AU - Griesser, Thomas
AU - Mitterer, Christian
AU - Pippan, Reinhard
AU - Cordill, Megan
PY - 2021
Y1 - 2021
U2 - 10.1021/acsanm.0c02182
DO - 10.1021/acsanm.0c02182
M3 - Article
VL - 2021
SP - 61
EP - 70
JO - ACS Applied Nano Materials
JF - ACS Applied Nano Materials
SN - 2574-0970
IS - 4
ER -