Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute for Surface Technologies and Photonics, Joanneum Research Forschungsgesellschaft mbH
- Institute of Ion Beam Physics and Materials Research, Helmholtz Zentrum Dresden -Rossendorf
Details
| Original language | English |
|---|---|
| Pages (from-to) | 1-7 |
| Journal | Surface & coatings technology |
| Volume | 2021 |
| Issue number | 418 |
| DOIs | |
| Publication status | Published - 2021 |
