Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure
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Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure. / Schalk, Nina; Saringer, Christian; Fian, Alexander et al.
In: Surface & coatings technology, Vol. 2021, No. 418, 2021, p. 1-7.
In: Surface & coatings technology, Vol. 2021, No. 418, 2021, p. 1-7.
Research output: Contribution to journal › Article › Research › peer-review
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Schalk, N, Saringer, C, Fian, A, Terziyska, V, Julin, J & Tkadletz, M 2021, 'Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure', Surface & coatings technology, vol. 2021, no. 418, pp. 1-7. https://doi.org/10.1016/j.surfcoat.2021.127237
APA
Vancouver
Schalk N, Saringer C, Fian A, Terziyska V, Julin J, Tkadletz M. Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure. Surface & coatings technology. 2021;2021(418):1-7. doi: 10.1016/j.surfcoat.2021.127237
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Bibtex - Download
@article{61fb62f736074ad5a8ca0fdc6f68b2f3,
title = "Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure",
author = "Nina Schalk and Christian Saringer and Alexander Fian and Velislava Terziyska and J. Julin and Michael Tkadletz",
year = "2021",
doi = "10.1016/j.surfcoat.2021.127237",
language = "English",
volume = "2021",
pages = "1--7",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "418",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure
AU - Schalk, Nina
AU - Saringer, Christian
AU - Fian, Alexander
AU - Terziyska, Velislava
AU - Julin, J.
AU - Tkadletz, Michael
PY - 2021
Y1 - 2021
U2 - 10.1016/j.surfcoat.2021.127237
DO - 10.1016/j.surfcoat.2021.127237
M3 - Article
VL - 2021
SP - 1
EP - 7
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
IS - 418
ER -
