Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | English |
|---|---|
| Pages (from-to) | 637 |
| Number of pages | 644 |
| Journal | Beilstein journal of nanotechnology |
| Volume | 7 |
| Publication status | Published - 28 Apr 2016 |
