Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
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In: Beilstein journal of nanotechnology , Vol. 7, 28.04.2016, p. 637.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
AU - Ganser, Christian
AU - Popovski, Gerhard
AU - Morak, Roland
AU - Sharifi Rajabi, Parvin
AU - Marmiroli, Benedetta
AU - Sartori, Barbara
AU - Amenitsch, Heinz
AU - Griesser, Thomas
AU - Teichert, Christian
AU - Paris, Oskar
PY - 2016/4/28
Y1 - 2016/4/28
M3 - Article
VL - 7
SP - 637
JO - Beilstein journal of nanotechnology
JF - Beilstein journal of nanotechnology
SN - 2190-4286
ER -