Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

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Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers. / Ganser, Christian; Popovski, Gerhard; Morak, Roland et al.
In: Beilstein journal of nanotechnology , Vol. 7, 28.04.2016, p. 637.

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@article{e178203d32044ac28dd82d47605d0dbc,
title = "Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers",
author = "Christian Ganser and Gerhard Popovski and Roland Morak and {Sharifi Rajabi}, Parvin and Benedetta Marmiroli and Barbara Sartori and Heinz Amenitsch and Thomas Griesser and Christian Teichert and Oskar Paris",
year = "2016",
month = apr,
day = "28",
language = "English",
volume = "7",
pages = "637",
journal = "Beilstein journal of nanotechnology ",
issn = "2190-4286",
publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",

}

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TY - JOUR

T1 - Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

AU - Ganser, Christian

AU - Popovski, Gerhard

AU - Morak, Roland

AU - Sharifi Rajabi, Parvin

AU - Marmiroli, Benedetta

AU - Sartori, Barbara

AU - Amenitsch, Heinz

AU - Griesser, Thomas

AU - Teichert, Christian

AU - Paris, Oskar

PY - 2016/4/28

Y1 - 2016/4/28

M3 - Article

VL - 7

SP - 637

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

SN - 2190-4286

ER -