Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects
Research output: Contribution to journal › Article › Research › peer-review
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Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects. / Angay, Firat; Löfler, Lukas; Tetard, Florent et al.
In: Journal of vacuum science & technology / A (JVST), Vol. 2020, 2020, p. 1-14.
In: Journal of vacuum science & technology / A (JVST), Vol. 2020, 2020, p. 1-14.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Angay, F, Löfler, L, Tetard, F, Eyidi, D, Djemia, P, Holec, D & Abadias, G 2020, 'Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects', Journal of vacuum science & technology / A (JVST), vol. 2020, pp. 1-14. https://doi.org/10.1116/6.0000292
APA
Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D., & Abadias, G. (2020). Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects. Journal of vacuum science & technology / A (JVST), 2020, 1-14. https://doi.org/10.1116/6.0000292
Vancouver
Angay F, Löfler L, Tetard F, Eyidi D, Djemia P, Holec D et al. Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects. Journal of vacuum science & technology / A (JVST). 2020;2020:1-14. doi: 10.1116/6.0000292
Author
Bibtex - Download
@article{9fd0e5f75f2b4236839134f8ea4a6c4a,
title = "Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects",
author = "Firat Angay and Lukas L{\"o}fler and Florent Tetard and Dominique Eyidi and Philippe Djemia and David Holec and Gregory Abadias",
year = "2020",
doi = "10.1116/6.0000292",
language = "English",
volume = "2020",
pages = "1--14",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects
AU - Angay, Firat
AU - Löfler, Lukas
AU - Tetard, Florent
AU - Eyidi, Dominique
AU - Djemia, Philippe
AU - Holec, David
AU - Abadias, Gregory
PY - 2020
Y1 - 2020
U2 - 10.1116/6.0000292
DO - 10.1116/6.0000292
M3 - Article
VL - 2020
SP - 1
EP - 14
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -
