Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Universite Paris 13-Sorbonne
- CNRS-Université de Poitiers-ENSMA
Details
| Original language | English |
|---|---|
| Pages (from-to) | 1-14 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 2020 |
| DOIs | |
| Publication status | Published - 2020 |
