Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

Research output: Contribution to journalArticleResearchpeer-review

Details

Original languageEnglish
Pages (from-to)022201-1 - 022201-11
Number of pages11
JournalJournal of vacuum science & technology / B (JVST)
Volume35
DOIs
Publication statusPublished - 2017