Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers
Research output: Contribution to journal › Article › Research › peer-review
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Original language | English |
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Pages (from-to) | 022201-1 - 022201-11 |
Number of pages | 11 |
Journal | Journal of vacuum science & technology / B (JVST) |
Volume | 35 |
DOIs | |
Publication status | Published - 2017 |