Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets
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In: Journal of vacuum science & technology / A (JVST), 2017, p. 041504-1 - 041504-6.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets
AU - Lorenz, Roland
AU - O 'Sullivan, M.
AU - Sprenger, D.
AU - Lang, Bernhard
AU - Mitterer, Christian
PY - 2017
Y1 - 2017
U2 - http://dx.doi.org/10.1116/1.4983689
DO - http://dx.doi.org/10.1116/1.4983689
M3 - Article
SP - 041504-1 - 041504-6
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -