Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

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Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets. / Lorenz, Roland; O 'Sullivan, M.; Sprenger, D. et al.
In: Journal of vacuum science & technology / A (JVST), 2017, p. 041504-1 - 041504-6.

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@article{d627c3912a334616b8a4607d4e3f3388,
title = "Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets",
author = "Roland Lorenz and {O 'Sullivan}, M. and D. Sprenger and Bernhard Lang and Christian Mitterer",
year = "2017",
doi = "http://dx.doi.org/10.1116/1.4983689",
language = "English",
pages = "041504--1 -- 041504--6",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",

}

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TY - JOUR

T1 - Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

AU - Lorenz, Roland

AU - O 'Sullivan, M.

AU - Sprenger, D.

AU - Lang, Bernhard

AU - Mitterer, Christian

PY - 2017

Y1 - 2017

U2 - http://dx.doi.org/10.1116/1.4983689

DO - http://dx.doi.org/10.1116/1.4983689

M3 - Article

SP - 041504-1 - 041504-6

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

ER -