Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets
Research output: Contribution to journal › Article › Research › peer-review
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| Original language | English |
|---|---|
| Pages (from-to) | 041504-1 - 041504-6 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| DOIs | |
| Publication status | Published - 2017 |
