Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films. / da Silva, Felipe C; Tunes, Matheus A; Sagás, Julio C et al.
in: Procedia structural integrity / ESIS, Jahrgang 13, 2018, S. 658-663.
in: Procedia structural integrity / ESIS, Jahrgang 13, 2018, S. 658-663.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
da Silva, FC, Tunes, MA, Sagás, JC & Schön, CG 2018, 'Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films', Procedia structural integrity / ESIS, Jg. 13, S. 658-663. https://doi.org/10.1016/j.prostr.2018.12.109
APA
da Silva, F. C., Tunes, M. A., Sagás, J. C., & Schön, C. G. (2018). Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films. Procedia structural integrity / ESIS, 13, 658-663. https://doi.org/10.1016/j.prostr.2018.12.109
Vancouver
da Silva FC, Tunes MA, Sagás JC, Schön CG. Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films. Procedia structural integrity / ESIS. 2018;13:658-663. doi: 10.1016/j.prostr.2018.12.109
Author
Bibtex - Download
@article{e58787c978c845a0953e4aa871cf9c3e,
title = "Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films",
author = "{da Silva}, {Felipe C} and Tunes, {Matheus A} and Sag{\'a}s, {Julio C} and Sch{\"o}n, {Cl{\'a}udio G}",
year = "2018",
doi = "10.1016/j.prostr.2018.12.109",
language = "English",
volume = "13",
pages = "658--663",
journal = "Procedia structural integrity / ESIS",
issn = "2452-3216",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films
AU - da Silva, Felipe C
AU - Tunes, Matheus A
AU - Sagás, Julio C
AU - Schön, Cláudio G
PY - 2018
Y1 - 2018
U2 - 10.1016/j.prostr.2018.12.109
DO - 10.1016/j.prostr.2018.12.109
M3 - Article
VL - 13
SP - 658
EP - 663
JO - Procedia structural integrity / ESIS
JF - Procedia structural integrity / ESIS
SN - 2452-3216
ER -
