Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. / Kleinbichler, Andreas; Todt, Juraj; Zechner, J. et al.
in: Surface & coatings technology, Jahrgang 332, 2017, S. 376-381.
in: Surface & coatings technology, Jahrgang 332, 2017, S. 376-381.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Kleinbichler, A, Todt, J, Zechner, J, Wöhlert, S, Cordill, M & Többens, D 2017, 'Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers', Surface & coatings technology, Jg. 332, S. 376-381.
APA
Kleinbichler, A., Todt, J., Zechner, J., Wöhlert, S., Cordill, M., & Többens, D. (2017). Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. Surface & coatings technology, 332, 376-381.
Vancouver
Kleinbichler A, Todt J, Zechner J, Wöhlert S, Cordill M, Többens D. Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers. Surface & coatings technology. 2017;332:376-381.
Author
Bibtex - Download
@article{19cd291a875b4d4dadf20d8c757a181d,
title = "Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers",
author = "Andreas Kleinbichler and Juraj Todt and J. Zechner and S. W{\"o}hlert and Megan Cordill and Daniel T{\"o}bbens",
year = "2017",
language = "English",
volume = "332",
pages = "376--381",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
AU - Kleinbichler, Andreas
AU - Todt, Juraj
AU - Zechner, J.
AU - Wöhlert, S.
AU - Cordill, Megan
AU - Többens, Daniel
PY - 2017
Y1 - 2017
M3 - Article
VL - 332
SP - 376
EP - 381
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
