Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

Research output: Contribution to journal › Article › Research › peer-review

Standard

Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry. / Taudt, Christopher; Nelsen, Bryan; Rossegger, Elisabeth et al.
In: Sensors (Basel, Switzerland), Vol. 19, No. 5, 1152, 07.03.2019.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Taudt, C, Nelsen, B, Rossegger, E, Schlögl, S, Koch, E & Hartmann, P 2019, 'Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry', Sensors (Basel, Switzerland), vol. 19, no. 5, 1152. https://doi.org/10.3390/s19051152

APA

Taudt, C., Nelsen, B., Rossegger, E., Schlögl, S., Koch, E., & Hartmann, P. (2019). Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry. Sensors (Basel, Switzerland), 19(5), Article 1152. https://doi.org/10.3390/s19051152

Vancouver

Taudt C, Nelsen B, Rossegger E, Schlögl S, Koch E, Hartmann P. Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry. Sensors (Basel, Switzerland). 2019 Mar 7;19(5):1152. doi: 10.3390/s19051152

Author

Taudt, Christopher ; Nelsen, Bryan ; Rossegger, Elisabeth et al. / Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry. In: Sensors (Basel, Switzerland). 2019 ; Vol. 19, No. 5.

Bibtex - Download

@article{2685213607024fe29caa25de0b4e6f56,
title = "Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry",
keywords = "cross-linking characterization, dispersion-enhanced low-coherence interferometry, interferometry, photoresist, semiconductor manufacturing, white-light interferometry",
author = "Christopher Taudt and Bryan Nelsen and Elisabeth Rossegger and Sandra Schl{\"o}gl and Edmund Koch and Peter Hartmann",
year = "2019",
month = mar,
day = "7",
doi = "10.3390/s19051152",
language = "English",
volume = "19",
journal = "Sensors (Basel, Switzerland)",
issn = "1424-8220",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "5",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

AU - Taudt, Christopher

AU - Nelsen, Bryan

AU - Rossegger, Elisabeth

AU - Schlögl, Sandra

AU - Koch, Edmund

AU - Hartmann, Peter

PY - 2019/3/7

Y1 - 2019/3/7

KW - cross-linking characterization

KW - dispersion-enhanced low-coherence interferometry

KW - interferometry

KW - photoresist

KW - semiconductor manufacturing

KW - white-light interferometry

UR - http://www.scopus.com/inward/record.url?scp=85062818031&partnerID=8YFLogxK

U2 - 10.3390/s19051152

DO - 10.3390/s19051152

M3 - Article

C2 - 30866475

AN - SCOPUS:85062818031

VL - 19

JO - Sensors (Basel, Switzerland)

JF - Sensors (Basel, Switzerland)

SN - 1424-8220

IS - 5

M1 - 1152

ER -

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