Rausch, M.,
Mraz, S.,
Kreiml, P.,
Cordill, M. J.,
Schneider, J. M.,
Winkler, J. &
Mitterer, C.,
2020,
In: Journal of vacuum science & technology / A (JVST). 38.2020,
2,
p. 1-10 023401.
Research output: Contribution to journal › Article › Research › peer-review