Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

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Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate. / Vogel, U.; Oswald, Steffen; Eckert, Jürgen.
In: Applied surface science, Vol. 425, 12.2017, p. 254-260.

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@article{0ca72b7de66d4314834f1db9110e53a8,
title = "Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate",
author = "U. Vogel and Steffen Oswald and J{\"u}rgen Eckert",
year = "2017",
month = dec,
language = "English",
volume = "425",
pages = "254--260",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

AU - Vogel, U.

AU - Oswald, Steffen

AU - Eckert, Jürgen

PY - 2017/12

Y1 - 2017/12

M3 - Article

VL - 425

SP - 254

EP - 260

JO - Applied surface science

JF - Applied surface science

SN - 0169-4332

ER -