Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Research output: Contribution to conferencePresentationResearchpeer-review

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Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States.

Research output: Contribution to conferencePresentationResearchpeer-review

Harvard

Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N, Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States, 20/04/15 - 24/04/15.

APA

Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L., & Mitterer, C. (2015). Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States.

Vancouver

Mühlbacher M, Mendez Martin F, Sartory B, Chitu L, Lu J, Schalk N et al.. Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 2015. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States.

Author

Mühlbacher, Marlene ; Mendez Martin, Francisca ; Sartory, Bernhard et al. / Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films, San Diego, United States.

Bibtex - Download

@conference{928c76d9abd744939265f08465f59245,
title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",
year = "2015",
language = "English",
note = "42nd International Conference on Metallurgical Coatings and Thin Films ; Conference date: 20-04-2015 Through 24-04-2015",
url = "https://www2.avs.org/conferences/icmctf/",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Chitu, Livia

AU - Lu, Jun

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Presentation

T2 - 42nd International Conference on Metallurgical Coatings and Thin Films

Y2 - 20 April 2015 through 24 April 2015

ER -