Georg Gruber

(Former)

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2019
The sputter performance of an industrial-scale planar Mo-target over ist lifetime:target erosion and film properties
Rausch, M. (Speaker), Sabag, A. (contributor), Pichler, K.-H. (contributor), Gruber, G. (contributor), Köstenbauer, J. (contributor), Köstenbauer, H. (contributor), Kreiml, P. (contributor), Cordill, M. J. (contributor), Winkler, J. (contributor) & Mitterer, C. (contributor)
1 May 2019
Activity: Talk or presentation › Oral presentation