Georg Gruber

(Former)

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2019
The sputter performance of an industrial-scale planar Mo-target over ist lifetime:target erosion and film properties
Martin Rausch (Speaker), Asaf Sabag (contributor), Karl-Heinz Pichler (contributor), Georg Gruber (contributor), Judith Köstenbauer (contributor), Harald Köstenbauer (contributor), Patrice Kreiml (contributor), Megan J. Cordill (contributor), Jörg Winkler (contributor) & Christian Mitterer (contributor)
1 May 2019
Activity: Talk or presentation › Oral presentation