Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties
Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Dissertation
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2009.
Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Dissertation
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TY - BOOK
T1 - Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties
AU - Kahn, Markus
N1 - embargoed until null
PY - 2009
Y1 - 2009
N2 - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
AB - The aim of the present thesis was the physical vapour deposition (PVD) process development and investigation of the film structure/properties relationships of room-temperature (
KW - Amorphous Carbon Films (a-C) Physical Vapour Deposition (PVD) Magnetron Sputtering Pulsed Laser Deposition (PLD) Raman Spectroscopy
KW - Amorphe Kohlenstoffschichten (a-C) Physikalische Dampfphasenabscheidung (PVD) Magnetronkathoden-Zerstäuben (Sputtern) gepulste Laser Dampfphasenabscheidung (PLD) Raman Spektroskopie
M3 - Doctoral Thesis
ER -
