Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy
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in: Journal of analytical atomic spectrometry, Jahrgang 31, Nr. 11, 01.11.2016, S. 2207-2212.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy
AU - Schubert, C.
AU - Hoffmann, V.
AU - Kümmel, A.
AU - Sinn, J.
AU - Härtel, M.
AU - Reuther, A.
AU - Thomalla, M.
AU - Gemming, T.
AU - Eckert, J.
AU - Leyens, C.
PY - 2016/11/1
Y1 - 2016/11/1
UR - http://www.scopus.com/inward/record.url?scp=84993990735&partnerID=8YFLogxK
U2 - 10.1039/c6ja00251j
DO - 10.1039/c6ja00251j
M3 - Article
AN - SCOPUS:84993990735
VL - 31
SP - 2207
EP - 2212
JO - Journal of analytical atomic spectrometry
JF - Journal of analytical atomic spectrometry
SN - 0267-9477
IS - 11
ER -