The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- PLANSEE SE
- Department of Mechanical Engineering, Ort Braude College
- Erich Schmid Institute of Materials Science
Details
| Original language | English |
|---|---|
| Pages (from-to) | 1-14 |
| Journal | Surface & coatings technology |
| Volume | 2020 |
| Issue number | 381 |
| DOIs | |
| Publication status | Published - 2019 |
