Sputter deposition of NiW films from a rotatable target
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Sputter deposition of NiW films from a rotatable target. / Rausch, Martin; Golizadeh Najafabadi, Mehran; Kreiml, Patrice et al.
In: Applied surface science, 2020, p. 145616 1-7.
In: Applied surface science, 2020, p. 145616 1-7.
Research output: Contribution to journal › Article › Research › peer-review
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Rausch M, Golizadeh Najafabadi M, Kreiml P, Cordill M, Winkler J, Mitterer C. Sputter deposition of NiW films from a rotatable target. Applied surface science. 2020;145616 1-7. doi: 10.1016/j.apsusc.2020.145616
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@article{94492be2f3c7435685a8a560a87cae5b,
title = "Sputter deposition of NiW films from a rotatable target",
author = "Martin Rausch and {Golizadeh Najafabadi}, Mehran and Patrice Kreiml and Megan Cordill and J{\"o}rg Winkler and Christian Mitterer",
year = "2020",
doi = "10.1016/j.apsusc.2020.145616",
language = "English",
pages = "145616 1--7",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Sputter deposition of NiW films from a rotatable target
AU - Rausch, Martin
AU - Golizadeh Najafabadi, Mehran
AU - Kreiml, Patrice
AU - Cordill, Megan
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2020
Y1 - 2020
U2 - 10.1016/j.apsusc.2020.145616
DO - 10.1016/j.apsusc.2020.145616
M3 - Article
SP - 1456161
EP - 1456167
JO - Applied surface science
JF - Applied surface science
SN - 0169-4332
ER -
