Self-structuring in Zr1−xAlxN films as a function of composition and growth temperature
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In: Scientific reports (London : Nature Publishing Group), 2018, p. 1-17.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Self-structuring in Zr1−xAlxN films as a function of composition and growth temperature
AU - Ghafoor, Naureen
AU - Petrov, I.
AU - Holec, David
AU - Greczynski, G.
AU - Palisaitis, J.
AU - Persson, P.O.Å.
AU - Hultman, Lars
AU - Birch, J.
PY - 2018
Y1 - 2018
U2 - 10.1038/s41598-018-34279-w
DO - 10.1038/s41598-018-34279-w
M3 - Article
SP - 1
EP - 17
JO - Scientific reports (London : Nature Publishing Group)
JF - Scientific reports (London : Nature Publishing Group)
SN - 2045-2322
ER -