Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films

Research output: Contribution to journal › Article › Research › peer-review

Authors

Original language	English
Pages (from-to)	658-663
Number of pages	6
Journal	Procedia structural integrity / ESIS
Volume	13
DOIs	https://doi.org/10.1016/j.prostr.2018.12.109
Publication status	Published - 2018