Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Energy and Nuclear Research (IPEN-CNEN/SP)
- Department of Metallurgical and Materials Engineering
- Oak Ridge National Laboratory
- Universidade do Estado de Santa Catarina
Details
| Original language | Undefined/Unknown |
|---|---|
| Journal | SN applied sciences |
| DOIs | |
| Publication status | Published - May 2020 |
