Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue

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Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue. / Bigl, Stephan; Trost, Claus O.W.; Wurster, Stefan et al.
In: Journal of materials research (JMR), Vol. 32, No. 11, 14.06.2017, p. 2022-2034.

Research output: Contribution to journalArticleResearchpeer-review

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@article{846321e4e74f41c284427b5e03144efb,
title = "Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue",
keywords = "fatigue, texture, thermal stresses",
author = "Stephan Bigl and Trost, {Claus O.W.} and Stefan Wurster and Cordill, {Megan J.} and Daniel Kiener",
year = "2017",
month = jun,
day = "14",
doi = "10.1557/jmr.2017.199",
language = "English",
volume = "32",
pages = "2022--2034",
journal = "Journal of materials research (JMR)",
issn = "0884-2914",
publisher = "Materials Research Society : MRS",
number = "11",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue

AU - Bigl, Stephan

AU - Trost, Claus O.W.

AU - Wurster, Stefan

AU - Cordill, Megan J.

AU - Kiener, Daniel

PY - 2017/6/14

Y1 - 2017/6/14

KW - fatigue

KW - texture

KW - thermal stresses

UR - http://www.scopus.com/inward/record.url?scp=85020723130&partnerID=8YFLogxK

U2 - 10.1557/jmr.2017.199

DO - 10.1557/jmr.2017.199

M3 - Article

AN - SCOPUS:85020723130

VL - 32

SP - 2022

EP - 2034

JO - Journal of materials research (JMR)

JF - Journal of materials research (JMR)

SN - 0884-2914

IS - 11

ER -