Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue
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In: Journal of materials research (JMR), Vol. 32, No. 11, 14.06.2017, p. 2022-2034.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue
AU - Bigl, Stephan
AU - Trost, Claus O.W.
AU - Wurster, Stefan
AU - Cordill, Megan J.
AU - Kiener, Daniel
PY - 2017/6/14
Y1 - 2017/6/14
KW - fatigue
KW - texture
KW - thermal stresses
UR - http://www.scopus.com/inward/record.url?scp=85020723130&partnerID=8YFLogxK
U2 - 10.1557/jmr.2017.199
DO - 10.1557/jmr.2017.199
M3 - Article
AN - SCOPUS:85020723130
VL - 32
SP - 2022
EP - 2034
JO - Journal of materials research (JMR)
JF - Journal of materials research (JMR)
SN - 0884-2914
IS - 11
ER -