Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations
Research output: Contribution to journal › Article › Research › peer-review
Standard
Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations. / Mühlbacher, Marlene; Bochkarev, Anton S.; Mendez Martin, Francisca et al.
In: Journal of applied physics, Vol. 118, 2015, p. 085307-1 - 085307-11.
In: Journal of applied physics, Vol. 118, 2015, p. 085307-1 - 085307-11.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Mühlbacher, M, Bochkarev, AS, Mendez Martin, F, Sartory, B, Chitu, L, Popov, M, Puschnig, P, Spitaler, J, Ding, H, Schalk, N, Lu, J, Hultman, L & Mitterer, C 2015, 'Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations', Journal of applied physics, vol. 118, pp. 085307-1 - 085307-11.
APA
Mühlbacher, M., Bochkarev, A. S., Mendez Martin, F., Sartory, B., Chitu, L., Popov, M., Puschnig, P., Spitaler, J., Ding, H., Schalk, N., Lu, J., Hultman, L., & Mitterer, C. (2015). Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations. Journal of applied physics, 118, 085307-1 - 085307-11.
Vancouver
Mühlbacher M, Bochkarev AS, Mendez Martin F, Sartory B, Chitu L, Popov M et al. Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations. Journal of applied physics. 2015;118:085307-1 - 085307-11.
Author
Bibtex - Download
@article{003d83c6a4cf4775ab9fa04a95500220,
title = "Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations",
author = "Marlene M{\"u}hlbacher and Bochkarev, {Anton S.} and {Mendez Martin}, Francisca and Bernhard Sartory and Livia Chitu and Maxim Popov and Peter Puschnig and J{\"u}rgen Spitaler and Hong Ding and Nina Schalk and Jun Lu and Lars Hultman and Christian Mitterer",
year = "2015",
language = "English",
volume = "118",
pages = "085307--1 -- 085307--11",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations
AU - Mühlbacher, Marlene
AU - Bochkarev, Anton S.
AU - Mendez Martin, Francisca
AU - Sartory, Bernhard
AU - Chitu, Livia
AU - Popov, Maxim
AU - Puschnig, Peter
AU - Spitaler, Jürgen
AU - Ding, Hong
AU - Schalk, Nina
AU - Lu, Jun
AU - Hultman, Lars
AU - Mitterer, Christian
PY - 2015
Y1 - 2015
M3 - Article
VL - 118
SP - 085307-1 - 085307-11
JO - Journal of applied physics
JF - Journal of applied physics
SN - 0021-8979
ER -
