Cu diffusion in single-crystal and polycrystalline TiN barrier layers: A high-resolution experimental study supported by first-principles calculations
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Materials Center Leoben Forschungs GmbH
- Technische Universität Graz
- Lawrence Berkeley National Laboratory
- Linköping University
Details
| Original language | English |
|---|---|
| Pages (from-to) | 085307-1 - 085307-11 |
| Journal | Journal of applied physics |
| Volume | 118 |
| Publication status | Published - 2015 |
