Annealing effects on the film stress and adhesion of tungsten-titanium barrier layers
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH
- Erich Schmid Institute of Materials Science
- Infineon Technologies AG Austria
- Helmholtz-Zentrum Berlin für Materialien und Energie (HZB)
Details
| Original language | English |
|---|---|
| Pages (from-to) | 376-381 |
| Journal | Surface & coatings technology |
| Volume | 332 |
| Publication status | Published - 2017 |
