Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Plasma sources science & technology (Plasma Sources Science and technology), 2018, S. 1-17.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum
AU - Zöhrer, Siegfried
AU - Anders, André
AU - Franz, Robert
PY - 2018
Y1 - 2018
U2 - 10.1088/1361-6595/aabdc7
DO - 10.1088/1361-6595/aabdc7
M3 - Article
SP - 1
EP - 17
JO - Plasma sources science & technology (Plasma Sources Science and technology)
JF - Plasma sources science & technology (Plasma Sources Science and technology)
SN - 0963-0252
ER -