The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties. / Rausch, Martin; Sabag, Asaf; Pichler, Karl-Heinz et al.
in: Surface & coatings technology, Jahrgang 2020, Nr. 381, 2019, S. 1-14.
in: Surface & coatings technology, Jahrgang 2020, Nr. 381, 2019, S. 1-14.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Rausch, M, Sabag, A, Pichler, K-H, Gruber, G, Köstenbauer, J, Köstenbauer, H, Kreiml, P, Cordill, MJ, Winkler, J & Mitterer, C 2019, 'The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties', Surface & coatings technology, Jg. 2020, Nr. 381, S. 1-14. https://doi.org/10.1016/j.surfcoat.2019125174
APA
Rausch, M., Sabag, A., Pichler, K.-H., Gruber, G., Köstenbauer, J., Köstenbauer, H., Kreiml, P., Cordill, M. J., Winkler, J., & Mitterer, C. (2019). The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties. Surface & coatings technology, 2020(381), 1-14. https://doi.org/10.1016/j.surfcoat.2019125174
Vancouver
Rausch M, Sabag A, Pichler KH, Gruber G, Köstenbauer J, Köstenbauer H et al. The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties. Surface & coatings technology. 2019;2020(381):1-14. doi: 10.1016/j.surfcoat.2019125174
Author
Bibtex - Download
@article{b38ea8625de8461da41494d40badead3,
title = "The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties",
author = "Martin Rausch and Asaf Sabag and Karl-Heinz Pichler and Georg Gruber and Judith K{\"o}stenbauer and Harald K{\"o}stenbauer and Patrice Kreiml and Cordill, {Megan J.} and J Winkler and Christian Mitterer",
year = "2019",
doi = "10.1016/j.surfcoat.2019125174",
language = "English",
volume = "2020",
pages = "1--14",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "381",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - The sputter performance of an industrial-scale planar Mo-target over ist lifetime: target erosion and film properties
AU - Rausch, Martin
AU - Sabag, Asaf
AU - Pichler, Karl-Heinz
AU - Gruber, Georg
AU - Köstenbauer, Judith
AU - Köstenbauer, Harald
AU - Kreiml, Patrice
AU - Cordill, Megan J.
AU - Winkler, J
AU - Mitterer, Christian
PY - 2019
Y1 - 2019
U2 - 10.1016/j.surfcoat.2019125174
DO - 10.1016/j.surfcoat.2019125174
M3 - Article
VL - 2020
SP - 1
EP - 14
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
IS - 381
ER -
