Sputter deposition of Mo-based multicomponent thin films from rotatable targets : Experiment and simulation

Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

Autoren

Faculty of Electrical Engineering and Information Technology, Slovak University of Technology in Bratislava
Plansee SE
Erich Schmid Institute of Materials Science of the Austrian Academy of Sciences