Erosion and cathodic arc plasma of Nb–Al cathodes: composite versus intermetallic
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Plasma sources science & technology (Plasma Sources Science and technology), Jahrgang 2020, 2020, S. 1-14.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Erosion and cathodic arc plasma of Nb–Al cathodes: composite versus intermetallic
AU - Zöhrer, Siegfried
AU - Golizadeh Najafabadi, Mehran
AU - Koutná, Nikola
AU - Holec, David
AU - Anders, André
AU - Franz, Robert
PY - 2020
Y1 - 2020
U2 - 10.1088/1361-6595/ab5e32
DO - 10.1088/1361-6595/ab5e32
M3 - Article
VL - 2020
SP - 1
EP - 14
JO - Plasma sources science & technology (Plasma Sources Science and technology)
JF - Plasma sources science & technology (Plasma Sources Science and technology)
SN - 0963-0252
ER -