Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons. / Panjan, Matjaz; Franz, Robert; Anders, A.
in: Plasma sources science & technology (Plasma Sources Science and technology), Jahrgang 23, 2014, S. 0250071-02500712.
in: Plasma sources science & technology (Plasma Sources Science and technology), Jahrgang 23, 2014, S. 0250071-02500712.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Panjan, M, Franz, R & Anders, A 2014, 'Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons', Plasma sources science & technology (Plasma Sources Science and technology), Jg. 23, S. 0250071-02500712. https://doi.org/10.1088/0963-0252/23/2/025007
APA
Panjan, M., Franz, R., & Anders, A. (2014). Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons. Plasma sources science & technology (Plasma Sources Science and technology), 23, 0250071-02500712. https://doi.org/10.1088/0963-0252/23/2/025007
Vancouver
Panjan M, Franz R, Anders A. Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons. Plasma sources science & technology (Plasma Sources Science and technology). 2014;23:0250071-02500712. doi: 10.1088/0963-0252/23/2/025007
Author
Bibtex - Download
@article{6ed02a61b3e645519b7820655fa59cd5,
title = "Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons",
author = "Matjaz Panjan and Robert Franz and A. Anders",
year = "2014",
doi = "10.1088/0963-0252/23/2/025007",
language = "English",
volume = "23",
pages = "0250071--02500712",
journal = "Plasma sources science & technology (Plasma Sources Science and technology)",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
AU - Panjan, Matjaz
AU - Franz, Robert
AU - Anders, A.
PY - 2014
Y1 - 2014
U2 - 10.1088/0963-0252/23/2/025007
DO - 10.1088/0963-0252/23/2/025007
M3 - Article
VL - 23
SP - 250071
EP - 2500712
JO - Plasma sources science & technology (Plasma Sources Science and technology)
JF - Plasma sources science & technology (Plasma Sources Science and technology)
SN - 0963-0252
ER -
