Neuester Forschungsoutput

• Microstructural Effects on the Interfacial Adhesion of Nanometer-Thick Cu Films on Glass Substrates: Implications for Microelectronic Devices

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)